TOPICS
The conference is intended to focus on the following general topics:
CVD Fundamentals
for instance:
Novel CVD techniques
- (Plasma assisted) ALD
- iCVD
- HVPE
- Novel precursors
- CVD techniques for low cost applications
Novel materials and structures
- Photonic materials
- (Nano)composites
- Nano-wires and tubes
- Low and high k dielectrics
- Ultra thin films
- Low and high stress films
- Barrier coatings
Novel modeling and simulation techniques
- Thermochemistry and reaction kinetics
- Precursor design
- Process and equipment design
Novel processing tools and equipment
- Reactors
- Gas delivery systems
- Process control and diagnostics
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